Obj	V_Res	µm/pix	Z step (µm)	Scanning	Sampling	Destripe
LCT 4x	1600	1.873	5	Fast	1/1	N/A/0
Wavelength	Power L	Power R				
488	70.00	70.00				
561	15.00	15.00				
642	40.00	40.00				
	20.00	20.00				
X	Y	Z	Laser	Side	Exposure	Skip
123180	104590	2686	488	0	2	1
123180	104590	3286	488	0	2	1
123180	104590	3886	488	0	2	1
123180	104590	4486	488	0	2	1
123180	104590	5086	488	0	2	1
123180	104590	5686	488	0	2	1
123180	104590	6286	488	0	2	1
123180	104590	6886	488	0	2	1
123180	104590	7486	488	0	2	1
123180	104590	8086	488	0	2	1
123180	104590	8686	488	0	2	1
123180	104590	2686	561	0	2	1
123180	104590	3286	561	0	2	1
123180	104590	3886	561	0	2	1
123180	104590	4486	561	0	2	1
123180	104590	5086	561	0	2	1
123180	104590	5686	561	0	2	1
123180	104590	6286	561	0	2	1
123180	104590	6886	561	0	2	1
123180	104590	7486	561	0	2	1
123180	104590	8086	561	0	2	1
123180	104590	8686	561	0	2	1
123180	104590	2686	642	0	2	1
123180	104590	3286	642	0	2	1
123180	104590	3886	642	0	2	1
123180	104590	4486	642	0	2	1
123180	104590	5086	642	0	2	1
123180	104590	5686	642	0	2	1
123180	104590	6286	642	0	2	1
123180	104590	6886	642	0	2	1
123180	104590	7486	642	0	2	1
123180	104590	8086	642	0	2	1
123180	104590	8686	642	0	2	1
156890	104590	2686	488	1	2	1
156890	104590	3286	488	1	2	1
156890	104590	3886	488	1	2	1
156890	104590	4486	488	1	2	1
156890	104590	5086	488	1	2	1
156890	104590	5686	488	1	2	1
156890	104590	6286	488	1	2	1
156890	104590	6886	488	1	2	1
156890	104590	7486	488	1	2	1
156890	104590	8086	488	1	2	1
156890	104590	8686	488	1	2	1
156890	104590	2686	561	1	2	1
156890	104590	3286	561	1	2	1
156890	104590	3886	561	1	2	1
156890	104590	4486	561	1	2	1
156890	104590	5086	561	1	2	1
156890	104590	5686	561	1	2	1
156890	104590	6286	561	1	2	1
156890	104590	6886	561	1	2	1
156890	104590	7486	561	1	2	1
156890	104590	8086	561	1	2	1
156890	104590	8686	561	1	2	1
156890	104590	2686	642	1	2	1
156890	104590	3286	642	1	2	1
156890	104590	3886	642	1	2	1
156890	104590	4486	642	1	2	1
156890	104590	5086	642	1	2	1
156890	104590	5686	642	1	2	1
156890	104590	6286	642	1	2	1
156890	104590	6886	642	1	2	1
156890	104590	7486	642	1	2	1
156890	104590	8086	642	1	2	1
156890	104590	8686	642	1	2	1
190600	104590	2686	488	1	2	1
190600	104590	3286	488	1	2	1
190600	104590	3886	488	1	2	1
190600	104590	4486	488	1	2	1
190600	104590	5086	488	1	2	1
190600	104590	5686	488	1	2	1
190600	104590	6286	488	1	2	1
190600	104590	6886	488	1	2	1
190600	104590	7486	488	1	2	1
190600	104590	8086	488	1	2	1
190600	104590	8686	488	1	2	1
190600	104590	2686	561	1	2	1
190600	104590	3286	561	1	2	1
190600	104590	3886	561	1	2	1
190600	104590	4486	561	1	2	1
190600	104590	5086	561	1	2	1
190600	104590	5686	561	1	2	1
190600	104590	6286	561	1	2	1
190600	104590	6886	561	1	2	1
190600	104590	7486	561	1	2	1
190600	104590	8086	561	1	2	1
190600	104590	8686	561	1	2	1
190600	104590	2686	642	1	2	1
190600	104590	3286	642	1	2	1
190600	104590	3886	642	1	2	1
190600	104590	4486	642	1	2	1
190600	104590	5086	642	1	2	1
190600	104590	5686	642	1	2	1
190600	104590	6286	642	1	2	1
190600	104590	6886	642	1	2	1
190600	104590	7486	642	1	2	1
190600	104590	8086	642	1	2	1
190600	104590	8686	642	1	2	1
123180	131560	2686	488	0	2	1
123180	131560	3286	488	0	2	1
123180	131560	3886	488	0	2	1
123180	131560	4486	488	0	2	1
123180	131560	5086	488	0	2	1
123180	131560	5686	488	0	2	1
123180	131560	6286	488	0	2	1
123180	131560	6886	488	0	2	1
123180	131560	7486	488	0	2	1
123180	131560	8086	488	0	2	1
123180	131560	8686	488	0	2	1
123180	131560	2686	561	0	2	1
123180	131560	3286	561	0	2	1
123180	131560	3886	561	0	2	1
123180	131560	4486	561	0	2	1
123180	131560	5086	561	0	2	1
123180	131560	5686	561	0	2	1
123180	131560	6286	561	0	2	1
123180	131560	6886	561	0	2	1
123180	131560	7486	561	0	2	1
123180	131560	8086	561	0	2	1
123180	131560	8686	561	0	2	1
123180	131560	2686	642	0	2	1
123180	131560	3286	642	0	2	1
123180	131560	3886	642	0	2	1
123180	131560	4486	642	0	2	1
123180	131560	5086	642	0	2	1
123180	131560	5686	642	0	2	1
123180	131560	6286	642	0	2	1
123180	131560	6886	642	0	2	1
123180	131560	7486	642	0	2	1
123180	131560	8086	642	0	2	1
123180	131560	8686	642	0	2	1
156890	131560	2686	488	1	2	1
156890	131560	3286	488	1	2	1
156890	131560	3886	488	1	2	1
156890	131560	4486	488	1	2	1
156890	131560	5086	488	1	2	1
156890	131560	5686	488	1	2	1
156890	131560	6286	488	1	2	1
156890	131560	6886	488	1	2	1
156890	131560	7486	488	1	2	1
156890	131560	8086	488	1	2	1
156890	131560	8686	488	1	2	1
156890	131560	2686	561	1	2	1
156890	131560	3286	561	1	2	1
156890	131560	3886	561	1	2	1
156890	131560	4486	561	1	2	1
156890	131560	5086	561	1	2	1
156890	131560	5686	561	1	2	1
156890	131560	6286	561	1	2	1
156890	131560	6886	561	1	2	1
156890	131560	7486	561	1	2	1
156890	131560	8086	561	1	2	1
156890	131560	8686	561	1	2	1
156890	131560	2686	642	1	2	1
156890	131560	3286	642	1	2	1
156890	131560	3886	642	1	2	1
156890	131560	4486	642	1	2	1
156890	131560	5086	642	1	2	1
156890	131560	5686	642	1	2	1
156890	131560	6286	642	1	2	1
156890	131560	6886	642	1	2	1
156890	131560	7486	642	1	2	1
156890	131560	8086	642	1	2	1
156890	131560	8686	642	1	2	1
190600	131560	2686	488	1	2	1
190600	131560	3286	488	1	2	1
190600	131560	3886	488	1	2	1
190600	131560	4486	488	1	2	1
190600	131560	5086	488	1	2	1
190600	131560	5686	488	1	2	1
190600	131560	6286	488	1	2	1
190600	131560	6886	488	1	2	1
190600	131560	7486	488	1	2	1
190600	131560	8086	488	1	2	1
190600	131560	8686	488	1	2	1
190600	131560	2686	561	1	2	1
190600	131560	3286	561	1	2	1
190600	131560	3886	561	1	2	1
190600	131560	4486	561	1	2	1
190600	131560	5086	561	1	2	1
190600	131560	5686	561	1	2	1
190600	131560	6286	561	1	2	1
190600	131560	6886	561	1	2	1
190600	131560	7486	561	1	2	1
190600	131560	8086	561	1	2	1
190600	131560	8686	561	1	2	1
190600	131560	2686	642	1	2	1
190600	131560	3286	642	1	2	1
190600	131560	3886	642	1	2	1
190600	131560	4486	642	1	2	1
190600	131560	5086	642	1	2	1
190600	131560	5686	642	1	2	1
190600	131560	6286	642	1	2	1
190600	131560	6886	642	1	2	1
190600	131560	7486	642	1	2	1
190600	131560	8086	642	1	2	1
190600	131560	8686	642	1	2	1
123180	158530	2686	488	0	2	1
123180	158530	3286	488	0	2	1
123180	158530	3886	488	0	2	1
123180	158530	4486	488	0	2	1
123180	158530	5086	488	0	2	1
123180	158530	5686	488	0	2	1
123180	158530	6286	488	0	2	1
123180	158530	6886	488	0	2	1
123180	158530	7486	488	0	2	1
123180	158530	8086	488	0	2	1
123180	158530	8686	488	0	2	1
123180	158530	2686	561	0	2	1
123180	158530	3286	561	0	2	1
123180	158530	3886	561	0	2	1
123180	158530	4486	561	0	2	1
123180	158530	5086	561	0	2	1
123180	158530	5686	561	0	2	1
123180	158530	6286	561	0	2	1
123180	158530	6886	561	0	2	1
123180	158530	7486	561	0	2	1
123180	158530	8086	561	0	2	1
123180	158530	8686	561	0	2	1
123180	158530	2686	642	0	2	1
123180	158530	3286	642	0	2	1
123180	158530	3886	642	0	2	1
123180	158530	4486	642	0	2	1
123180	158530	5086	642	0	2	1
123180	158530	5686	642	0	2	1
123180	158530	6286	642	0	2	1
123180	158530	6886	642	0	2	1
123180	158530	7486	642	0	2	1
123180	158530	8086	642	0	2	1
123180	158530	8686	642	0	2	1
156890	158530	2686	488	1	2	1
156890	158530	3286	488	1	2	1
156890	158530	3886	488	1	2	1
156890	158530	4486	488	1	2	1
156890	158530	5086	488	1	2	1
156890	158530	5686	488	1	2	1
156890	158530	6286	488	1	2	1
156890	158530	6886	488	1	2	1
156890	158530	7486	488	1	2	1
156890	158530	8086	488	1	2	1
156890	158530	8686	488	1	2	1
156890	158530	2686	561	1	2	1
156890	158530	3286	561	1	2	1
156890	158530	3886	561	1	2	1
156890	158530	4486	561	1	2	1
156890	158530	5086	561	1	2	1
156890	158530	5686	561	1	2	1
156890	158530	6286	561	1	2	1
156890	158530	6886	561	1	2	1
156890	158530	7486	561	1	2	1
156890	158530	8086	561	1	2	1
156890	158530	8686	561	1	2	1
156890	158530	2686	642	1	2	1
156890	158530	3286	642	1	2	1
156890	158530	3886	642	1	2	1
156890	158530	4486	642	1	2	1
156890	158530	5086	642	1	2	1
156890	158530	5686	642	1	2	1
156890	158530	6286	642	1	2	1
156890	158530	6886	642	1	2	1
156890	158530	7486	642	1	2	1
156890	158530	8086	642	1	2	1
156890	158530	8686	642	1	2	1
190600	158530	2686	488	1	2	1
190600	158530	3286	488	1	2	1
190600	158530	3886	488	1	2	1
190600	158530	4486	488	1	2	1
190600	158530	5086	488	1	2	1
190600	158530	5686	488	1	2	1
190600	158530	6286	488	1	2	1
190600	158530	6886	488	1	2	1
190600	158530	7486	488	1	2	1
190600	158530	8086	488	1	2	1
190600	158530	8686	488	1	2	1
190600	158530	2686	561	1	2	1
190600	158530	3286	561	1	2	1
190600	158530	3886	561	1	2	1
190600	158530	4486	561	1	2	1
190600	158530	5086	561	1	2	1
190600	158530	5686	561	1	2	1
190600	158530	6286	561	1	2	1
190600	158530	6886	561	1	2	1
190600	158530	7486	561	1	2	1
190600	158530	8086	561	1	2	1
190600	158530	8686	561	1	2	1
190600	158530	2686	642	1	2	1
190600	158530	3286	642	1	2	1
190600	158530	3886	642	1	2	1
190600	158530	4486	642	1	2	1
190600	158530	5086	642	1	2	1
190600	158530	5686	642	1	2	1
190600	158530	6286	642	1	2	1
190600	158530	6886	642	1	2	1
190600	158530	7486	642	1	2	1
190600	158530	8086	642	1	2	1
190600	158530	8686	642	1	2	1
123180	185500	2686	488	0	2	1
123180	185500	3286	488	0	2	1
123180	185500	3886	488	0	2	1
123180	185500	4486	488	0	2	1
123180	185500	5086	488	0	2	1
123180	185500	5686	488	0	2	1
123180	185500	6286	488	0	2	1
123180	185500	6886	488	0	2	1
123180	185500	7486	488	0	2	1
123180	185500	8086	488	0	2	1
123180	185500	8686	488	0	2	1
123180	185500	2686	561	0	2	1
123180	185500	3286	561	0	2	1
123180	185500	3886	561	0	2	1
123180	185500	4486	561	0	2	1
123180	185500	5086	561	0	2	1
123180	185500	5686	561	0	2	1
123180	185500	6286	561	0	2	1
123180	185500	6886	561	0	2	1
123180	185500	7486	561	0	2	1
123180	185500	8086	561	0	2	1
123180	185500	8686	561	0	2	1
123180	185500	2686	642	0	2	1
123180	185500	3286	642	0	2	1
123180	185500	3886	642	0	2	1
123180	185500	4486	642	0	2	1
123180	185500	5086	642	0	2	1
123180	185500	5686	642	0	2	1
123180	185500	6286	642	0	2	1
123180	185500	6886	642	0	2	1
123180	185500	7486	642	0	2	1
123180	185500	8086	642	0	2	1
123180	185500	8686	642	0	2	1
156890	185500	2686	488	1	2	1
156890	185500	3286	488	1	2	1
156890	185500	3886	488	1	2	1
156890	185500	4486	488	1	2	1
156890	185500	5086	488	1	2	1
156890	185500	5686	488	1	2	1
156890	185500	6286	488	1	2	1
156890	185500	6886	488	1	2	1
156890	185500	7486	488	1	2	1
156890	185500	8086	488	1	2	1
156890	185500	8686	488	1	2	1
156890	185500	2686	561	1	2	1
156890	185500	3286	561	1	2	1
156890	185500	3886	561	1	2	1
156890	185500	4486	561	1	2	1
156890	185500	5086	561	1	2	1
156890	185500	5686	561	1	2	1
156890	185500	6286	561	1	2	1
156890	185500	6886	561	1	2	1
156890	185500	7486	561	1	2	1
156890	185500	8086	561	1	2	1
156890	185500	8686	561	1	2	1
156890	185500	2686	642	1	2	1
156890	185500	3286	642	1	2	1
156890	185500	3886	642	1	2	1
156890	185500	4486	642	1	2	1
156890	185500	5086	642	1	2	1
156890	185500	5686	642	1	2	1
156890	185500	6286	642	1	2	1
156890	185500	6886	642	1	2	1
156890	185500	7486	642	1	2	1
156890	185500	8086	642	1	2	1
156890	185500	8686	642	1	2	1
190600	185500	2686	488	1	2	1
190600	185500	3286	488	1	2	1
190600	185500	3886	488	1	2	1
190600	185500	4486	488	1	2	1
190600	185500	5086	488	1	2	1
190600	185500	5686	488	1	2	1
190600	185500	6286	488	1	2	1
190600	185500	6886	488	1	2	1
190600	185500	7486	488	1	2	1
190600	185500	8086	488	1	2	1
190600	185500	8686	488	1	2	1
190600	185500	2686	561	1	2	1
190600	185500	3286	561	1	2	1
190600	185500	3886	561	1	2	1
190600	185500	4486	561	1	2	1
190600	185500	5086	561	1	2	1
190600	185500	5686	561	1	2	1
190600	185500	6286	561	1	2	1
190600	185500	6886	561	1	2	1
190600	185500	7486	561	1	2	1
190600	185500	8086	561	1	2	1
190600	185500	8686	561	1	2	1
190600	185500	2686	642	1	2	1
190600	185500	3286	642	1	2	1
190600	185500	3886	642	1	2	1
190600	185500	4486	642	1	2	1
190600	185500	5086	642	1	2	1
190600	185500	5686	642	1	2	1
190600	185500	6286	642	1	2	1
190600	185500	6886	642	1	2	1
190600	185500	7486	642	1	2	1
190600	185500	8086	642	1	2	1
190600	185500	8686	642	1	2	1
123180	212470	2686	488	0	2	1
123180	212470	3286	488	0	2	1
123180	212470	3886	488	0	2	1
123180	212470	4486	488	0	2	1
123180	212470	5086	488	0	2	1
123180	212470	5686	488	0	2	1
123180	212470	6286	488	0	2	1
123180	212470	6886	488	0	2	1
123180	212470	7486	488	0	2	1
123180	212470	8086	488	0	2	1
123180	212470	8686	488	0	2	1
123180	212470	2686	561	0	2	1
123180	212470	3286	561	0	2	1
123180	212470	3886	561	0	2	1
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