Obj	V_Res	µm/pix	Z step (µm)	Scanning	Sampling	Destripe
LCT 4x	1600	1.873	5	Fast	1/1	N/A/0
Wavelength	Power L	Power R				
488	70.00	70.00				
561	5.00	5.00				
642	40.00	40.00				
	20.00	20.00				
X	Y	Z	Laser	Side	Exposure	Skip
127060	104750	578	488	0	2	1
127060	104750	1178	488	0	2	1
127060	104750	1778	488	0	2	1
127060	104750	2378	488	0	2	1
127060	104750	2978	488	0	2	1
127060	104750	3578	488	0	2	1
127060	104750	4178	488	0	2	1
127060	104750	4778	488	0	2	1
127060	104750	5378	488	0	2	1
127060	104750	5978	488	0	2	1
127060	104750	578	561	0	2	1
127060	104750	1178	561	0	2	1
127060	104750	1778	561	0	2	1
127060	104750	2378	561	0	2	1
127060	104750	2978	561	0	2	1
127060	104750	3578	561	0	2	1
127060	104750	4178	561	0	2	1
127060	104750	4778	561	0	2	1
127060	104750	5378	561	0	2	1
127060	104750	5978	561	0	2	1
127060	104750	578	642	0	2	1
127060	104750	1178	642	0	2	1
127060	104750	1778	642	0	2	1
127060	104750	2378	642	0	2	1
127060	104750	2978	642	0	2	1
127060	104750	3578	642	0	2	1
127060	104750	4178	642	0	2	1
127060	104750	4778	642	0	2	1
127060	104750	5378	642	0	2	1
127060	104750	5978	642	0	2	1
160770	104750	578	488	1	2	1
160770	104750	1178	488	1	2	1
160770	104750	1778	488	1	2	1
160770	104750	2378	488	1	2	1
160770	104750	2978	488	1	2	1
160770	104750	3578	488	1	2	1
160770	104750	4178	488	1	2	1
160770	104750	4778	488	1	2	1
160770	104750	5378	488	1	2	1
160770	104750	5978	488	1	2	1
160770	104750	578	561	1	2	1
160770	104750	1178	561	1	2	1
160770	104750	1778	561	1	2	1
160770	104750	2378	561	1	2	1
160770	104750	2978	561	1	2	1
160770	104750	3578	561	1	2	1
160770	104750	4178	561	1	2	1
160770	104750	4778	561	1	2	1
160770	104750	5378	561	1	2	1
160770	104750	5978	561	1	2	1
160770	104750	578	642	1	2	1
160770	104750	1178	642	1	2	1
160770	104750	1778	642	1	2	1
160770	104750	2378	642	1	2	1
160770	104750	2978	642	1	2	1
160770	104750	3578	642	1	2	1
160770	104750	4178	642	1	2	1
160770	104750	4778	642	1	2	1
160770	104750	5378	642	1	2	1
160770	104750	5978	642	1	2	1
194480	104750	578	488	1	2	1
194480	104750	1178	488	1	2	1
194480	104750	1778	488	1	2	1
194480	104750	2378	488	1	2	1
194480	104750	2978	488	1	2	1
194480	104750	3578	488	1	2	1
194480	104750	4178	488	1	2	1
194480	104750	4778	488	1	2	1
194480	104750	5378	488	1	2	1
194480	104750	5978	488	1	2	1
194480	104750	578	561	1	2	1
194480	104750	1178	561	1	2	1
194480	104750	1778	561	1	2	1
194480	104750	2378	561	1	2	1
194480	104750	2978	561	1	2	1
194480	104750	3578	561	1	2	1
194480	104750	4178	561	1	2	1
194480	104750	4778	561	1	2	1
194480	104750	5378	561	1	2	1
194480	104750	5978	561	1	2	1
194480	104750	578	642	1	2	1
194480	104750	1178	642	1	2	1
194480	104750	1778	642	1	2	1
194480	104750	2378	642	1	2	1
194480	104750	2978	642	1	2	1
194480	104750	3578	642	1	2	1
194480	104750	4178	642	1	2	1
194480	104750	4778	642	1	2	1
194480	104750	5378	642	1	2	1
194480	104750	5978	642	1	2	1
127060	131720	578	488	0	2	1
127060	131720	1178	488	0	2	1
127060	131720	1778	488	0	2	1
127060	131720	2378	488	0	2	1
127060	131720	2978	488	0	2	1
127060	131720	3578	488	0	2	1
127060	131720	4178	488	0	2	1
127060	131720	4778	488	0	2	1
127060	131720	5378	488	0	2	1
127060	131720	5978	488	0	2	1
127060	131720	578	561	0	2	1
127060	131720	1178	561	0	2	1
127060	131720	1778	561	0	2	1
127060	131720	2378	561	0	2	1
127060	131720	2978	561	0	2	1
127060	131720	3578	561	0	2	1
127060	131720	4178	561	0	2	1
127060	131720	4778	561	0	2	1
127060	131720	5378	561	0	2	1
127060	131720	5978	561	0	2	1
127060	131720	578	642	0	2	1
127060	131720	1178	642	0	2	1
127060	131720	1778	642	0	2	1
127060	131720	2378	642	0	2	1
127060	131720	2978	642	0	2	1
127060	131720	3578	642	0	2	1
127060	131720	4178	642	0	2	1
127060	131720	4778	642	0	2	1
127060	131720	5378	642	0	2	1
127060	131720	5978	642	0	2	1
160770	131720	578	488	1	2	1
160770	131720	1178	488	1	2	1
160770	131720	1778	488	1	2	1
160770	131720	2378	488	1	2	1
160770	131720	2978	488	1	2	1
160770	131720	3578	488	1	2	1
160770	131720	4178	488	1	2	1
160770	131720	4778	488	1	2	1
160770	131720	5378	488	1	2	1
160770	131720	5978	488	1	2	1
160770	131720	578	561	1	2	1
160770	131720	1178	561	1	2	1
160770	131720	1778	561	1	2	1
160770	131720	2378	561	1	2	1
160770	131720	2978	561	1	2	1
160770	131720	3578	561	1	2	1
160770	131720	4178	561	1	2	1
160770	131720	4778	561	1	2	1
160770	131720	5378	561	1	2	1
160770	131720	5978	561	1	2	1
160770	131720	578	642	1	2	1
160770	131720	1178	642	1	2	1
160770	131720	1778	642	1	2	1
160770	131720	2378	642	1	2	1
160770	131720	2978	642	1	2	1
160770	131720	3578	642	1	2	1
160770	131720	4178	642	1	2	1
160770	131720	4778	642	1	2	1
160770	131720	5378	642	1	2	1
160770	131720	5978	642	1	2	1
194480	131720	578	488	1	2	1
194480	131720	1178	488	1	2	1
194480	131720	1778	488	1	2	1
194480	131720	2378	488	1	2	1
194480	131720	2978	488	1	2	1
194480	131720	3578	488	1	2	1
194480	131720	4178	488	1	2	1
194480	131720	4778	488	1	2	1
194480	131720	5378	488	1	2	1
194480	131720	5978	488	1	2	1
194480	131720	578	561	1	2	1
194480	131720	1178	561	1	2	1
194480	131720	1778	561	1	2	1
194480	131720	2378	561	1	2	1
194480	131720	2978	561	1	2	1
194480	131720	3578	561	1	2	1
194480	131720	4178	561	1	2	1
194480	131720	4778	561	1	2	1
194480	131720	5378	561	1	2	1
194480	131720	5978	561	1	2	1
194480	131720	578	642	1	2	1
194480	131720	1178	642	1	2	1
194480	131720	1778	642	1	2	1
194480	131720	2378	642	1	2	1
194480	131720	2978	642	1	2	1
194480	131720	3578	642	1	2	1
194480	131720	4178	642	1	2	1
194480	131720	4778	642	1	2	1
194480	131720	5378	642	1	2	1
194480	131720	5978	642	1	2	1
127060	158690	578	488	0	2	1
127060	158690	1178	488	0	2	1
127060	158690	1778	488	0	2	1
127060	158690	2378	488	0	2	1
127060	158690	2978	488	0	2	1
127060	158690	3578	488	0	2	1
127060	158690	4178	488	0	2	1
127060	158690	4778	488	0	2	1
127060	158690	5378	488	0	2	1
127060	158690	5978	488	0	2	1
127060	158690	578	561	0	2	1
127060	158690	1178	561	0	2	1
127060	158690	1778	561	0	2	1
127060	158690	2378	561	0	2	1
127060	158690	2978	561	0	2	1
127060	158690	3578	561	0	2	1
127060	158690	4178	561	0	2	1
127060	158690	4778	561	0	2	1
127060	158690	5378	561	0	2	1
127060	158690	5978	561	0	2	1
127060	158690	578	642	0	2	1
127060	158690	1178	642	0	2	1
127060	158690	1778	642	0	2	1
127060	158690	2378	642	0	2	1
127060	158690	2978	642	0	2	1
127060	158690	3578	642	0	2	1
127060	158690	4178	642	0	2	1
127060	158690	4778	642	0	2	1
127060	158690	5378	642	0	2	1
127060	158690	5978	642	0	2	1
160770	158690	578	488	1	2	1
160770	158690	1178	488	1	2	1
160770	158690	1778	488	1	2	1
160770	158690	2378	488	1	2	1
160770	158690	2978	488	1	2	1
160770	158690	3578	488	1	2	1
160770	158690	4178	488	1	2	1
160770	158690	4778	488	1	2	1
160770	158690	5378	488	1	2	1
160770	158690	5978	488	1	2	1
160770	158690	578	561	1	2	1
160770	158690	1178	561	1	2	1
160770	158690	1778	561	1	2	1
160770	158690	2378	561	1	2	1
160770	158690	2978	561	1	2	1
160770	158690	3578	561	1	2	1
160770	158690	4178	561	1	2	1
160770	158690	4778	561	1	2	1
160770	158690	5378	561	1	2	1
160770	158690	5978	561	1	2	1
160770	158690	578	642	1	2	1
160770	158690	1178	642	1	2	1
160770	158690	1778	642	1	2	1
160770	158690	2378	642	1	2	1
160770	158690	2978	642	1	2	1
160770	158690	3578	642	1	2	1
160770	158690	4178	642	1	2	1
160770	158690	4778	642	1	2	1
160770	158690	5378	642	1	2	1
160770	158690	5978	642	1	2	1
194480	158690	578	488	1	2	1
194480	158690	1178	488	1	2	1
194480	158690	1778	488	1	2	1
194480	158690	2378	488	1	2	1
194480	158690	2978	488	1	2	1
194480	158690	3578	488	1	2	1
194480	158690	4178	488	1	2	1
194480	158690	4778	488	1	2	1
194480	158690	5378	488	1	2	1
194480	158690	5978	488	1	2	1
194480	158690	578	561	1	2	1
194480	158690	1178	561	1	2	1
194480	158690	1778	561	1	2	1
194480	158690	2378	561	1	2	1
194480	158690	2978	561	1	2	1
194480	158690	3578	561	1	2	1
194480	158690	4178	561	1	2	1
194480	158690	4778	561	1	2	1
194480	158690	5378	561	1	2	1
194480	158690	5978	561	1	2	1
194480	158690	578	642	1	2	1
194480	158690	1178	642	1	2	1
194480	158690	1778	642	1	2	1
194480	158690	2378	642	1	2	1
194480	158690	2978	642	1	2	1
194480	158690	3578	642	1	2	1
194480	158690	4178	642	1	2	1
194480	158690	4778	642	1	2	1
194480	158690	5378	642	1	2	1
194480	158690	5978	642	1	2	1
127060	185660	578	488	0	2	1
127060	185660	1178	488	0	2	1
127060	185660	1778	488	0	2	1
127060	185660	2378	488	0	2	1
127060	185660	2978	488	0	2	1
127060	185660	3578	488	0	2	1
127060	185660	4178	488	0	2	1
127060	185660	4778	488	0	2	1
127060	185660	5378	488	0	2	1
127060	185660	5978	488	0	2	1
127060	185660	578	561	0	2	1
127060	185660	1178	561	0	2	1
127060	185660	1778	561	0	2	1
127060	185660	2378	561	0	2	1
127060	185660	2978	561	0	2	1
127060	185660	3578	561	0	2	1
127060	185660	4178	561	0	2	1
127060	185660	4778	561	0	2	1
127060	185660	5378	561	0	2	1
127060	185660	5978	561	0	2	1
127060	185660	578	642	0	2	1
127060	185660	1178	642	0	2	1
127060	185660	1778	642	0	2	1
127060	185660	2378	642	0	2	1
127060	185660	2978	642	0	2	1
127060	185660	3578	642	0	2	1
127060	185660	4178	642	0	2	1
127060	185660	4778	642	0	2	1
127060	185660	5378	642	0	2	1
127060	185660	5978	642	0	2	1
160770	185660	578	488	1	2	1
160770	185660	1178	488	1	2	1
160770	185660	1778	488	1	2	1
160770	185660	2378	488	1	2	1
160770	185660	2978	488	1	2	1
160770	185660	3578	488	1	2	1
160770	185660	4178	488	1	2	1
160770	185660	4778	488	1	2	1
160770	185660	5378	488	1	2	1
160770	185660	5978	488	1	2	1
160770	185660	578	561	1	2	1
160770	185660	1178	561	1	2	1
160770	185660	1778	561	1	2	1
160770	185660	2378	561	1	2	1
160770	185660	2978	561	1	2	1
160770	185660	3578	561	1	2	1
160770	185660	4178	561	1	2	1
160770	185660	4778	561	1	2	1
160770	185660	5378	561	1	2	1
160770	185660	5978	561	1	2	1
160770	185660	578	642	1	2	1
160770	185660	1178	642	1	2	1
160770	185660	1778	642	1	2	1
160770	185660	2378	642	1	2	1
160770	185660	2978	642	1	2	1
160770	185660	3578	642	1	2	1
160770	185660	4178	642	1	2	1
160770	185660	4778	642	1	2	1
160770	185660	5378	642	1	2	1
160770	185660	5978	642	1	2	1
194480	185660	578	488	1	2	1
194480	185660	1178	488	1	2	1
194480	185660	1778	488	1	2	1
194480	185660	2378	488	1	2	1
194480	185660	2978	488	1	2	1
194480	185660	3578	488	1	2	1
194480	185660	4178	488	1	2	1
194480	185660	4778	488	1	2	1
194480	185660	5378	488	1	2	1
194480	185660	5978	488	1	2	1
194480	185660	578	561	1	2	1
194480	185660	1178	561	1	2	1
194480	185660	1778	561	1	2	1
194480	185660	2378	561	1	2	1
194480	185660	2978	561	1	2	1
194480	185660	3578	561	1	2	1
194480	185660	4178	561	1	2	1
194480	185660	4778	561	1	2	1
194480	185660	5378	561	1	2	1
194480	185660	5978	561	1	2	1
194480	185660	578	642	1	2	1
194480	185660	1178	642	1	2	1
194480	185660	1778	642	1	2	1
194480	185660	2378	642	1	2	1
194480	185660	2978	642	1	2	1
194480	185660	3578	642	1	2	1
194480	185660	4178	642	1	2	1
194480	185660	4778	642	1	2	1
194480	185660	5378	642	1	2	1
194480	185660	5978	642	1	2	1
127060	212630	578	488	0	2	1
127060	212630	1178	488	0	2	1
127060	212630	1778	488	0	2	1
127060	212630	2378	488	0	2	1
127060	212630	2978	488	0	2	1
127060	212630	3578	488	0	2	1
127060	212630	4178	488	0	2	1
127060	212630	4778	488	0	2	1
127060	212630	5378	488	0	2	1
127060	212630	5978	488	0	2	1
127060	212630	578	561	0	2	1
127060	212630	1178	561	0	2	1
127060	212630	1778	561	0	2	1
127060	212630	2378	561	0	2	1
127060	212630	2978	561	0	2	1
127060	212630	3578	561	0	2	1
127060	212630	4178	561	0	2	1
127060	212630	4778	561	0	2	1
127060	212630	5378	561	0	2	1
127060	212630	5978	561	0	2	1
127060	212630	578	642	0	2	1
127060	212630	1178	642	0	2	1
127060	212630	1778	642	0	2	1
127060	212630	2378	642	0	2	1
127060	212630	2978	642	0	2	1
127060	212630	3578	642	0	2	1
127060	212630	4178	642	0	2	1
127060	212630	4778	642	0	2	1
127060	212630	5378	642	0	2	1
127060	212630	5978	642	0	2	1
160770	212630	578	488	1	2	1
160770	212630	1178	488	1	2	1
160770	212630	1778	488	1	2	1
160770	212630	2378	488	1	2	1
160770	212630	2978	488	1	2	1
160770	212630	3578	488	1	2	1
160770	212630	4178	488	1	2	1
160770	212630	4778	488	1	2	1
160770	212630	5378	488	1	2	1
160770	212630	5978	488	1	2	1
160770	212630	578	561	1	2	1
160770	212630	1178	561	1	2	1
160770	212630	1778	561	1	2	1
160770	212630	2378	561	1	2	1
160770	212630	2978	561	1	2	1
160770	212630	3578	561	1	2	1
160770	212630	4178	561	1	2	1
160770	212630	4778	561	1	2	1
160770	212630	5378	561	1	2	1
160770	212630	5978	561	1	2	1
160770	212630	578	642	1	2	1
160770	212630	1178	642	1	2	1
160770	212630	1778	642	1	2	1
160770	212630	2378	642	1	2	1
160770	212630	2978	642	1	2	1
160770	212630	3578	642	1	2	1
160770	212630	4178	642	1	2	1
160770	212630	4778	642	1	2	1
160770	212630	5378	642	1	2	1
160770	212630	5978	642	1	2	1
194480	212630	578	488	1	2	1
194480	212630	1178	488	1	2	1
194480	212630	1778	488	1	2	1
194480	212630	2378	488	1	2	1
194480	212630	2978	488	1	2	1
194480	212630	3578	488	1	2	1
194480	212630	4178	488	1	2	1
194480	212630	4778	488	1	2	1
194480	212630	5378	488	1	2	1
194480	212630	5978	488	1	2	1
194480	212630	578	561	1	2	1
194480	212630	1178	561	1	2	1
194480	212630	1778	561	1	2	1
194480	212630	2378	561	1	2	1
194480	212630	2978	561	1	2	1
194480	212630	3578	561	1	2	1
194480	212630	4178	561	1	2	1
194480	212630	4778	561	1	2	1
194480	212630	5378	561	1	2	1
194480	212630	5978	561	1	2	1
194480	212630	578	642	1	2	1
194480	212630	1178	642	1	2	1
194480	212630	1778	642	1	2	1
194480	212630	2378	642	1	2	1
194480	212630	2978	642	1	2	1
194480	212630	3578	642	1	2	1
194480	212630	4178	642	1	2	1
194480	212630	4778	642	1	2	1
194480	212630	5378	642	1	2	1
194480	212630	5978	642	1	2	1