Obj	V_Res	µm/pix	Z step (µm)	Scanning	Sampling	Destripe	Z_Block
LCT 4x	1600	1.800	5	Fast	1/1	N/A/64	600
Wavelength	Power L	Power R					
488	22.00	19.00					
561	10.00	9.00					
642	40.00	40.00					
	20.00	20.00					
X	Y	Z	Laser	Side	Exposure	Skip	
477710	427080	1377	488	0	2	1	
477710	427080	1977	488	0	2	1	
477710	427080	2577	488	0	2	1	
477710	427080	3177	488	0	2	1	
477710	427080	3777	488	0	2	1	
477710	427080	4377	488	0	2	1	
477710	427080	4977	488	0	2	1	
477710	427080	5577	488	0	2	1	
477710	427080	6177	488	0	2	1	
477710	427080	6777	488	0	2	1	
477710	427080	7377	488	0	2	1	
477710	427080	7977	488	0	2	1	
477710	427080	8577	488	0	2	1	
477710	427080	9177	488	0	2	1	
477710	427080	9777	488	0	2	1	
477710	427080	10377	488	0	2	1	
477710	427080	1377	561	0	2	1	
477710	427080	1977	561	0	2	1	
477710	427080	2577	561	0	2	1	
477710	427080	3177	561	0	2	1	
477710	427080	3777	561	0	2	1	
477710	427080	4377	561	0	2	1	
477710	427080	4977	561	0	2	1	
477710	427080	5577	561	0	2	1	
477710	427080	6177	561	0	2	1	
477710	427080	6777	561	0	2	1	
477710	427080	7377	561	0	2	1	
477710	427080	7977	561	0	2	1	
477710	427080	8577	561	0	2	1	
477710	427080	9177	561	0	2	1	
477710	427080	9777	561	0	2	1	
477710	427080	10377	561	0	2	1	
477710	453000	1377	488	0	2	1	
477710	453000	1977	488	0	2	1	
477710	453000	2577	488	0	2	1	
477710	453000	3177	488	0	2	1	
477710	453000	3777	488	0	2	1	
477710	453000	4377	488	0	2	1	
477710	453000	4977	488	0	2	1	
477710	453000	5577	488	0	2	1	
477710	453000	6177	488	0	2	1	
477710	453000	6777	488	0	2	1	
477710	453000	7377	488	0	2	1	
477710	453000	7977	488	0	2	1	
477710	453000	8577	488	0	2	1	
477710	453000	9177	488	0	2	1	
477710	453000	9777	488	0	2	1	
477710	453000	10377	488	0	2	1	
477710	453000	1377	561	0	2	1	
477710	453000	1977	561	0	2	1	
477710	453000	2577	561	0	2	1	
477710	453000	3177	561	0	2	1	
477710	453000	3777	561	0	2	1	
477710	453000	4377	561	0	2	1	
477710	453000	4977	561	0	2	1	
477710	453000	5577	561	0	2	1	
477710	453000	6177	561	0	2	1	
477710	453000	6777	561	0	2	1	
477710	453000	7377	561	0	2	1	
477710	453000	7977	561	0	2	1	
477710	453000	8577	561	0	2	1	
477710	453000	9177	561	0	2	1	
477710	453000	9777	561	0	2	1	
477710	453000	10377	561	0	2	1	
477710	478920	1377	488	0	2	1	
477710	478920	1977	488	0	2	1	
477710	478920	2577	488	0	2	1	
477710	478920	3177	488	0	2	1	
477710	478920	3777	488	0	2	1	
477710	478920	4377	488	0	2	1	
477710	478920	4977	488	0	2	1	
477710	478920	5577	488	0	2	1	
477710	478920	6177	488	0	2	1	
477710	478920	6777	488	0	2	1	
477710	478920	7377	488	0	2	1	
477710	478920	7977	488	0	2	1	
477710	478920	8577	488	0	2	1	
477710	478920	9177	488	0	2	1	
477710	478920	9777	488	0	2	1	
477710	478920	10377	488	0	2	1	
477710	478920	1377	561	0	2	1	
477710	478920	1977	561	0	2	1	
477710	478920	2577	561	0	2	1	
477710	478920	3177	561	0	2	1	
477710	478920	3777	561	0	2	1	
477710	478920	4377	561	0	2	1	
477710	478920	4977	561	0	2	1	
477710	478920	5577	561	0	2	1	
477710	478920	6177	561	0	2	1	
477710	478920	6777	561	0	2	1	
477710	478920	7377	561	0	2	1	
477710	478920	7977	561	0	2	1	
477710	478920	8577	561	0	2	1	
477710	478920	9177	561	0	2	1	
477710	478920	9777	561	0	2	1	
477710	478920	10377	561	0	2	1	
477710	504840	1377	488	0	2	1	
477710	504840	1977	488	0	2	1	
477710	504840	2577	488	0	2	1	
477710	504840	3177	488	0	2	1	
477710	504840	3777	488	0	2	1	
477710	504840	4377	488	0	2	1	
477710	504840	4977	488	0	2	1	
477710	504840	5577	488	0	2	1	
477710	504840	6177	488	0	2	1	
477710	504840	6777	488	0	2	1	
477710	504840	7377	488	0	2	1	
477710	504840	7977	488	0	2	1	
477710	504840	8577	488	0	2	1	
477710	504840	9177	488	0	2	1	
477710	504840	9777	488	0	2	1	
477710	504840	10377	488	0	2	1	
477710	504840	1377	561	0	2	1	
477710	504840	1977	561	0	2	1	
477710	504840	2577	561	0	2	1	
477710	504840	3177	561	0	2	1	
477710	504840	3777	561	0	2	1	
477710	504840	4377	561	0	2	1	
477710	504840	4977	561	0	2	1	
477710	504840	5577	561	0	2	1	
477710	504840	6177	561	0	2	1	
477710	504840	6777	561	0	2	1	
477710	504840	7377	561	0	2	1	
477710	504840	7977	561	0	2	1	
477710	504840	8577	561	0	2	1	
477710	504840	9177	561	0	2	1	
477710	504840	9777	561	0	2	1	
477710	504840	10377	561	0	2	1	
477710	530760	1377	488	0	2	1	
477710	530760	1977	488	0	2	1	
477710	530760	2577	488	0	2	1	
477710	530760	3177	488	0	2	1	
477710	530760	3777	488	0	2	1	
477710	530760	4377	488	0	2	1	
477710	530760	4977	488	0	2	1	
477710	530760	5577	488	0	2	1	
477710	530760	6177	488	0	2	1	
477710	530760	6777	488	0	2	1	
477710	530760	7377	488	0	2	1	
477710	530760	7977	488	0	2	1	
477710	530760	8577	488	0	2	1	
477710	530760	9177	488	0	2	1	
477710	530760	9777	488	0	2	1	
477710	530760	10377	488	0	2	1	
477710	530760	1377	561	0	2	1	
477710	530760	1977	561	0	2	1	
477710	530760	2577	561	0	2	1	
477710	530760	3177	561	0	2	1	
477710	530760	3777	561	0	2	1	
477710	530760	4377	561	0	2	1	
477710	530760	4977	561	0	2	1	
477710	530760	5577	561	0	2	1	
477710	530760	6177	561	0	2	1	
477710	530760	6777	561	0	2	1	
477710	530760	7377	561	0	2	1	
477710	530760	7977	561	0	2	1	
477710	530760	8577	561	0	2	1	
477710	530760	9177	561	0	2	1	
477710	530760	9777	561	0	2	1	
477710	530760	10377	561	0	2	1	
510110	427080	1377	488	1	2	1	
510110	427080	1977	488	1	2	1	
510110	427080	2577	488	1	2	1	
510110	427080	3177	488	1	2	1	
510110	427080	3777	488	1	2	1	
510110	427080	4377	488	1	2	1	
510110	427080	4977	488	1	2	1	
510110	427080	5577	488	1	2	1	
510110	427080	6177	488	1	2	1	
510110	427080	6777	488	1	2	1	
510110	427080	7377	488	1	2	1	
510110	427080	7977	488	1	2	1	
510110	427080	8577	488	1	2	1	
510110	427080	9177	488	1	2	1	
510110	427080	9777	488	1	2	1	
510110	427080	10377	488	1	2	1	
510110	427080	1377	561	1	2	1	
510110	427080	1977	561	1	2	1	
510110	427080	2577	561	1	2	1	
510110	427080	3177	561	1	2	1	
510110	427080	3777	561	1	2	1	
510110	427080	4377	561	1	2	1	
510110	427080	4977	561	1	2	1	
510110	427080	5577	561	1	2	1	
510110	427080	6177	561	1	2	1	
510110	427080	6777	561	1	2	1	
510110	427080	7377	561	1	2	1	
510110	427080	7977	561	1	2	1	
510110	427080	8577	561	1	2	1	
510110	427080	9177	561	1	2	1	
510110	427080	9777	561	1	2	1	
510110	427080	10377	561	1	2	1	
510110	453000	1377	488	1	2	1	
510110	453000	1977	488	1	2	1	
510110	453000	2577	488	1	2	1	
510110	453000	3177	488	1	2	1	
510110	453000	3777	488	1	2	1	
510110	453000	4377	488	1	2	1	
510110	453000	4977	488	1	2	1	
510110	453000	5577	488	1	2	1	
510110	453000	6177	488	1	2	1	
510110	453000	6777	488	1	2	1	
510110	453000	7377	488	1	2	1	
510110	453000	7977	488	1	2	1	
510110	453000	8577	488	1	2	1	
510110	453000	9177	488	1	2	1	
510110	453000	9777	488	1	2	1	
510110	453000	10377	488	1	2	1	
510110	453000	1377	561	1	2	1	
510110	453000	1977	561	1	2	1	
510110	453000	2577	561	1	2	1	
510110	453000	3177	561	1	2	1	
510110	453000	3777	561	1	2	1	
510110	453000	4377	561	1	2	1	
510110	453000	4977	561	1	2	1	
510110	453000	5577	561	1	2	1	
510110	453000	6177	561	1	2	1	
510110	453000	6777	561	1	2	1	
510110	453000	7377	561	1	2	1	
510110	453000	7977	561	1	2	1	
510110	453000	8577	561	1	2	1	
510110	453000	9177	561	1	2	1	
510110	453000	9777	561	1	2	1	
510110	453000	10377	561	1	2	1	
510110	478920	1377	488	1	2	1	
510110	478920	1977	488	1	2	1	
510110	478920	2577	488	1	2	1	
510110	478920	3177	488	1	2	1	
510110	478920	3777	488	1	2	1	
510110	478920	4377	488	1	2	1	
510110	478920	4977	488	1	2	1	
510110	478920	5577	488	1	2	1	
510110	478920	6177	488	1	2	1	
510110	478920	6777	488	1	2	1	
510110	478920	7377	488	1	2	1	
510110	478920	7977	488	1	2	1	
510110	478920	8577	488	1	2	1	
510110	478920	9177	488	1	2	1	
510110	478920	9777	488	1	2	1	
510110	478920	10377	488	1	2	1	
510110	478920	1377	561	1	2	1	
510110	478920	1977	561	1	2	1	
510110	478920	2577	561	1	2	1	
510110	478920	3177	561	1	2	1	
510110	478920	3777	561	1	2	1	
510110	478920	4377	561	1	2	1	
510110	478920	4977	561	1	2	1	
510110	478920	5577	561	1	2	1	
510110	478920	6177	561	1	2	1	
510110	478920	6777	561	1	2	1	
510110	478920	7377	561	1	2	1	
510110	478920	7977	561	1	2	1	
510110	478920	8577	561	1	2	1	
510110	478920	9177	561	1	2	1	
510110	478920	9777	561	1	2	1	
510110	478920	10377	561	1	2	1	
510110	504840	1377	488	1	2	1	
510110	504840	1977	488	1	2	1	
510110	504840	2577	488	1	2	1	
510110	504840	3177	488	1	2	1	
510110	504840	3777	488	1	2	1	
510110	504840	4377	488	1	2	1	
510110	504840	4977	488	1	2	1	
510110	504840	5577	488	1	2	1	
510110	504840	6177	488	1	2	1	
510110	504840	6777	488	1	2	1	
510110	504840	7377	488	1	2	1	
510110	504840	7977	488	1	2	1	
510110	504840	8577	488	1	2	1	
510110	504840	9177	488	1	2	1	
510110	504840	9777	488	1	2	1	
510110	504840	10377	488	1	2	1	
510110	504840	1377	561	1	2	1	
510110	504840	1977	561	1	2	1	
510110	504840	2577	561	1	2	1	
510110	504840	3177	561	1	2	1	
510110	504840	3777	561	1	2	1	
510110	504840	4377	561	1	2	1	
510110	504840	4977	561	1	2	1	
510110	504840	5577	561	1	2	1	
510110	504840	6177	561	1	2	1	
510110	504840	6777	561	1	2	1	
510110	504840	7377	561	1	2	1	
510110	504840	7977	561	1	2	1	
510110	504840	8577	561	1	2	1	
510110	504840	9177	561	1	2	1	
510110	504840	9777	561	1	2	1	
510110	504840	10377	561	1	2	1	
510110	530760	1377	488	1	2	1	
510110	530760	1977	488	1	2	1	
510110	530760	2577	488	1	2	1	
510110	530760	3177	488	1	2	1	
510110	530760	3777	488	1	2	1	
510110	530760	4377	488	1	2	1	
510110	530760	4977	488	1	2	1	
510110	530760	5577	488	1	2	1	
510110	530760	6177	488	1	2	1	
510110	530760	6777	488	1	2	1	
510110	530760	7377	488	1	2	1	
510110	530760	7977	488	1	2	1	
510110	530760	8577	488	1	2	1	
510110	530760	9177	488	1	2	1	
510110	530760	9777	488	1	2	1	
510110	530760	10377	488	1	2	1	
510110	530760	1377	561	1	2	1	
510110	530760	1977	561	1	2	1	
510110	530760	2577	561	1	2	1	
510110	530760	3177	561	1	2	1	
510110	530760	3777	561	1	2	1	
510110	530760	4377	561	1	2	1	
510110	530760	4977	561	1	2	1	
510110	530760	5577	561	1	2	1	
510110	530760	6177	561	1	2	1	
510110	530760	6777	561	1	2	1	
510110	530760	7377	561	1	2	1	
510110	530760	7977	561	1	2	1	
510110	530760	8577	561	1	2	1	
510110	530760	9177	561	1	2	1	
510110	530760	9777	561	1	2	1	
510110	530760	10377	561	1	2	1	
542510	427080	1377	488	1	2	1	
542510	427080	1977	488	1	2	1	
542510	427080	2577	488	1	2	1	
542510	427080	3177	488	1	2	1	
542510	427080	3777	488	1	2	1	
542510	427080	4377	488	1	2	1	
542510	427080	4977	488	1	2	1	
542510	427080	5577	488	1	2	1	
542510	427080	6177	488	1	2	1	
542510	427080	6777	488	1	2	1	
542510	427080	7377	488	1	2	1	
542510	427080	7977	488	1	2	1	
542510	427080	8577	488	1	2	1	
542510	427080	9177	488	1	2	1	
542510	427080	9777	488	1	2	1	
542510	427080	10377	488	1	2	1	
542510	427080	1377	561	1	2	1	
542510	427080	1977	561	1	2	1	
542510	427080	2577	561	1	2	1	
542510	427080	3177	561	1	2	1	
542510	427080	3777	561	1	2	1	
542510	427080	4377	561	1	2	1	
542510	427080	4977	561	1	2	1	
542510	427080	5577	561	1	2	1	
542510	427080	6177	561	1	2	1	
542510	427080	6777	561	1	2	1	
542510	427080	7377	561	1	2	1	
542510	427080	7977	561	1	2	1	
542510	427080	8577	561	1	2	1	
542510	427080	9177	561	1	2	1	
542510	427080	9777	561	1	2	1	
542510	427080	10377	561	1	2	1	
542510	453000	1377	488	1	2	1	
542510	453000	1977	488	1	2	1	
542510	453000	2577	488	1	2	1	
542510	453000	3177	488	1	2	1	
542510	453000	3777	488	1	2	1	
542510	453000	4377	488	1	2	1	
542510	453000	4977	488	1	2	1	
542510	453000	5577	488	1	2	1	
542510	453000	6177	488	1	2	1	
542510	453000	6777	488	1	2	1	
542510	453000	7377	488	1	2	1	
542510	453000	7977	488	1	2	1	
542510	453000	8577	488	1	2	1	
542510	453000	9177	488	1	2	1	
542510	453000	9777	488	1	2	1	
542510	453000	10377	488	1	2	1	
542510	453000	1377	561	1	2	1	
542510	453000	1977	561	1	2	1	
542510	453000	2577	561	1	2	1	
542510	453000	3177	561	1	2	1	
542510	453000	3777	561	1	2	1	
542510	453000	4377	561	1	2	1	
542510	453000	4977	561	1	2	1	
542510	453000	5577	561	1	2	1	
542510	453000	6177	561	1	2	1	
542510	453000	6777	561	1	2	1	
542510	453000	7377	561	1	2	1	
542510	453000	7977	561	1	2	1	
542510	453000	8577	561	1	2	1	
542510	453000	9177	561	1	2	1	
542510	453000	9777	561	1	2	1	
542510	453000	10377	561	1	2	1	
542510	478920	1377	488	1	2	1	
542510	478920	1977	488	1	2	1	
542510	478920	2577	488	1	2	1	
542510	478920	3177	488	1	2	1	
542510	478920	3777	488	1	2	1	
542510	478920	4377	488	1	2	1	
542510	478920	4977	488	1	2	1	
542510	478920	5577	488	1	2	1	
542510	478920	6177	488	1	2	1	
542510	478920	6777	488	1	2	1	
542510	478920	7377	488	1	2	1	
542510	478920	7977	488	1	2	1	
542510	478920	8577	488	1	2	1	
542510	478920	9177	488	1	2	1	
542510	478920	9777	488	1	2	1	
542510	478920	10377	488	1	2	1	
542510	478920	1377	561	1	2	1	
542510	478920	1977	561	1	2	1	
542510	478920	2577	561	1	2	1	
542510	478920	3177	561	1	2	1	
542510	478920	3777	561	1	2	1	
542510	478920	4377	561	1	2	1	
542510	478920	4977	561	1	2	1	
542510	478920	5577	561	1	2	1	
542510	478920	6177	561	1	2	1	
542510	478920	6777	561	1	2	1	
542510	478920	7377	561	1	2	1	
542510	478920	7977	561	1	2	1	
542510	478920	8577	561	1	2	1	
542510	478920	9177	561	1	2	1	
542510	478920	9777	561	1	2	1	
542510	478920	10377	561	1	2	1	
542510	504840	1377	488	1	2	1	
542510	504840	1977	488	1	2	1	
542510	504840	2577	488	1	2	1	
542510	504840	3177	488	1	2	1	
542510	504840	3777	488	1	2	1	
542510	504840	4377	488	1	2	1	
542510	504840	4977	488	1	2	1	
542510	504840	5577	488	1	2	1	
542510	504840	6177	488	1	2	1	
542510	504840	6777	488	1	2	1	
542510	504840	7377	488	1	2	1	
542510	504840	7977	488	1	2	1	
542510	504840	8577	488	1	2	1	
542510	504840	9177	488	1	2	1	
542510	504840	9777	488	1	2	1	
542510	504840	10377	488	1	2	1	
542510	504840	1377	561	1	2	1	
542510	504840	1977	561	1	2	1	
542510	504840	2577	561	1	2	1	
542510	504840	3177	561	1	2	1	
542510	504840	3777	561	1	2	1	
542510	504840	4377	561	1	2	1	
542510	504840	4977	561	1	2	1	
542510	504840	5577	561	1	2	1	
542510	504840	6177	561	1	2	1	
542510	504840	6777	561	1	2	1	
542510	504840	7377	561	1	2	1	
542510	504840	7977	561	1	2	1	
542510	504840	8577	561	1	2	1	
542510	504840	9177	561	1	2	1	
542510	504840	9777	561	1	2	1	
542510	504840	10377	561	1	2	1	
542510	530760	1377	488	1	2	1	
542510	530760	1977	488	1	2	1	
542510	530760	2577	488	1	2	1	
542510	530760	3177	488	1	2	1	
542510	530760	3777	488	1	2	1	
542510	530760	4377	488	1	2	1	
542510	530760	4977	488	1	2	1	
542510	530760	5577	488	1	2	1	
542510	530760	6177	488	1	2	1	
542510	530760	6777	488	1	2	1	
542510	530760	7377	488	1	2	1	
542510	530760	7977	488	1	2	1	
542510	530760	8577	488	1	2	1	
542510	530760	9177	488	1	2	1	
542510	530760	9777	488	1	2	1	
542510	530760	10377	488	1	2	1	
542510	530760	1377	561	1	2	1	
542510	530760	1977	561	1	2	1	
542510	530760	2577	561	1	2	1	
542510	530760	3177	561	1	2	1	
542510	530760	3777	561	1	2	1	
542510	530760	4377	561	1	2	1	
542510	530760	4977	561	1	2	1	
542510	530760	5577	561	1	2	1	
542510	530760	6177	561	1	2	1	
542510	530760	6777	561	1	2	1	
542510	530760	7377	561	1	2	1	
542510	530760	7977	561	1	2	1	
542510	530760	8577	561	1	2	1	
542510	530760	9177	561	1	2	1	
542510	530760	9777	561	1	2	1	
542510	530760	10377	561	1	2	1